Compact Desktop Maskless Lithography System
Desktop Maskless Lithography System “PALET”
Model: DDB-701 Series
Desktop Size Maskeless (direct-exposure) Lithography System which supports simple lithography operation by its sophisticated software.
Hardware Feature
・Compact Size
・Built-in Vibration Isolation Mechanism & Vacuum Suction Pump
・Requiring Power Supply and Yellow Room, only
Software Feature
・User Friendly Interface
・Simple Work Flow
・Supporting Alignment & Exposure Condition Inspection *Motorized Stage Model, Only
Exposure Example
Circuit Pattern
Transistor Pattern
Magnetic Sensor Pattern
High Aspect Pillar
Structure
Structure
Thick Film Fluid Path
Structure
Structure
Magnetic Sensor Pattern
Specification
| Model | DDB-701-MS | DDB-701-DL |
|---|---|---|
| Stage | Manual XYZθ Stage | Motorized XYZθ Stage |
| Exposure Light Source | 365nm (typ.) LED | |
| Min. Line Width | 3μm *1 15μm *2 |
|
| One Shot Exposure Area | 1mm×0.6mm *1 5mm×3mm *2 |
|
| Exposure Time per One Shot *3 | 1～2 sec. *1 15～30 sec. *2 |
|
| Max. Exposure Area | 25mm×25mm (Manual Connection) | 5mm×25mm(Automatic Connection) |
| Acceptable Work Size | 60mm ×60mm (t3mm) | |
| Supporting File Format | DXF, JPEG, PNG, BITMAP, XPS | |
| Main Body Size | 300mm (W) × 450mm (D) ×450mm (H) | |
| Construction | Main Body / Note PC / Software | Main Body / Note PC / Stage Drivers /Software |
*1 In the case of using ×10 Objective Lens
*2 In the case of using ×2 Objective Lens
*3 Exposure time based on AZP series photoresist (t0.5mm)
