GHz Vibration Observation System
GHz Vibration Observation System
Model: MLD-101 Series
Laser based observation system specially designed for visualization of surface acoustic wave (SAW) and Bulk Acoustic Wave (BAW) of Dielectric / Piezoelectric based high frequency devices, such as SAW filters (Interdigital Transducer (IDT)) and Film Bulk Acoustic Resonators (FBAR).
Feature
・Suitable for Analysis of Physical Acoustic Wave Propagation over different frequencies
・Wide Area Observation in Short Time
Image FFT & IFFT Processing
Observation Example
■IDT
■FBAR
Specification
| Vibration Detecting Method | Sagnac Interferometer based Vibration Detection (Peak Frequency Sensitivity:5GHz) |
|---|---|
| Vibration Observation Method | Stage Control Scanning Observation with Laser Beam Probe (for Out-of-plane Vibration) |
| Observation Light Source | Diode Laser (Wavelength: 650nm Typ.), Lighting LED |
| Available Objective Lens | ×20、×50、×100 Objective Lenses |
| Observable Frequency | 500MHz ～ 6GHz (Typ.) |
| Driving Signal Input Range *1 | 500MHz～6GHz (-120dBM～＋15dBM) *2 |
| Maximum Analyzable Area | 25mm × 25mm |
| Acceptable Work | Max. 8 Inch Wafer |
| Sample Stage | Motorized X-Y Stage |
| Major Software Functions | Preset Area Scanning Observation based on Sample Stage Control |
| 2 Dimensional ⇔ 3 Dimensional Observation Result Indication (in Movie) | |
| 2 Dimensional FFT ⇔ IFFT Image Processing | |
| Specific Vibration Resonance Mode Filtering based on FFT Result | |
| Out-of-plane Axis Inclination Correction | |
| Continuous Data Acquisition based on Preset Frequency Table | |
| Construction | Main Body / Electrical Units / Signal Generator / Lock-in Amplifier / Stage Drivers / PC / Software |
